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Browsing by Author "Nilsson, Bengt"

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    Anisotropic vapor HF etching of silicon dioxide for Si microstructure release

    Passi, Vikram
    ;
    Sodervall, Ulf
    ;
    Nilsson, Bengt
    ;
    Petersson, Bengt
    ;
    Hagberg, Mats
    Journal article
    2012, Microelectronic Engineering, 95, p.83-89

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