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Browsing by Author "Noakes, T.C."

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    Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

    van den Berg, J.A.
    ;
    Werner, M.
    ;
    Armour, D.G.
    ;
    Vandervorst, Wilfried  
    ;
    Clarysse, Trudo
    Meeting abstract
    2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.446

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