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Browsing by Author "Noakes, Tim"

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    Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness

    Van den Berg, Jaap
    ;
    Reading, Michael
    ;
    Bailey, Paul
    ;
    Noakes, Tim
    ;
    Adelmann, Christoph  
    Journal article
    2013, Applied Surface Science, 281, p.8-16

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