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    Analysis of pocket profile deactivation and its impact on Vth variation for laser annealed device using an atomistic kinetic Monte Carlo approach

    Noda, Taichi
    ;
    Vandervorst, Wilfried  
    ;
    Vrancken, Christa  
    ;
    Ortolland, Claude
    ;
    Rosseel, Erik  
    Proceedings paper
    2010, IEEE International Electron Devices Meeting - IEDM, 6/12/2010, p.383-386

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