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Browsing by Author "Nowak, F."

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    Implementation of pattern-specific illumination pupil optimization on Step & Scan systems

    Engelen, A.
    ;
    Socha, R.
    ;
    Hendrickx, Eric  
    ;
    Scheepers, W.
    ;
    Nowak, F.
    ;
    van Dam, M.
    ;
    Liebchen, Armin
    Proceedings paper
    2004, Optical Microlithography XVII, 22/02/2004, p.1323-1333

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