Browsing by Author "O'Donnell, Kathy"
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Publication Pulsed DC sputtered aluminum nitride: a novel approach to control stress and C-axis orientation
; ;O'Donnell, Kathy; ;Vanhoyland, Geert; Proceedings paper2005, Materials, Integration and Packaging Issues for High-Frequency Devices II, 29/11/2004, p.49-54