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Browsing by Author "O'Donnell, Kathy"

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    Pulsed DC sputtered aluminum nitride: a novel approach to control stress and C-axis orientation

    Soussan, Philippe  
    ;
    O'Donnell, Kathy
    ;
    D'Haen, Jan  
    ;
    Vanhoyland, Geert
    ;
    Beyne, Eric  
    ;
    Tilmans, Harrie  
    Proceedings paper
    2005, Materials, Integration and Packaging Issues for High-Frequency Devices II, 29/11/2004, p.49-54

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