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Browsing by Author "OKa, Hironori"

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    Publication

    Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

    Nye, Rachel  
    ;
    Van Dongen, Kaat  
    ;
    De Simone, Danilo  
    ;
    OKa, Hironori  
    ;
    Parsons, Gregory N.
    Journal article
    2023, CHEMISTRY OF MATERIALS, (35) 5, p.2016-2026

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