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Browsing by Author "Obermeier, G."

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    Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing

    Möller, T.
    ;
    Obermeier, G.
    ;
    Bearda, Twan
    ;
    Huber, A.
    ;
    Schmolke, R.
    ;
    von Ammon, W.
    ;
    Lerch, W.
    Proceedings paper
    2001, GADEST 2001 - Proceedings of the 9th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology;, p.127-132

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