Browsing by Author "Ohmori, Katsumi"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Directed self-assembly of PS-b-PMMA with ionic liquid addition
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015Publication Newly developed positive-tone resists for Posi/Posi double patterning process
Publication World-wide standardization effort on leaching measurement methodology
Proceedings paper2007, 4th International Symposium on Immersion Lithography, 8/10/2007