Browsing by Author "Ojha, M."
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Publication Modification of nanoporous silica structures by fluorocarbon plasma treatment
;Cho, W. ;Saxena, R. ;Rodriguez, O. ;Achanta, R. ;Ojha, M. ;Plawsky, J.L. ;Gill, W.N.Baklanov, MikhaïlProceedings paper2004-06, Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics, 12/04/2004, p.103-108