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Browsing by Author "Okorn-Schmidt, H. F."

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    Quantitative modeling of H2O2 decomposition in SC1

    Mertens, Paul  
    ;
    Baeyens, Martien
    ;
    Moyaerts, Gert
    ;
    Okorn-Schmidt, H. F.
    ;
    Vos, Rita  
    ;
    De Waele, Rita
    Proceedings paper
    1998, Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 31/08/1997, p.176-183

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