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Browsing by Author "Olawumi, Teju Tunde"

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    Publication

    Modification of PECVD and SOG ultralow-k films by CO2 plasma

    Olawumi, Teju Tunde
    ;
    Levrau, E.
    ;
    Krishtab, Mikhail  
    ;
    Detavernier, C.
    ;
    Bartha, J.W.
    Journal article
    2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3048-N3057

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