Browsing by Author "Onandia, Laura"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Influence of UV irradiation on the removal of post-etch photoresist in porous low-k dielectric patterning
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2065Publication Influence of UV irradiation on the removal of post-etch photoresist in porous low-k dielectric patterning
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.63-70