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Browsing by Author "Onishi, Keiji"

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    Thin MEMS packages obtained by a novel collective cap transfer process

    Phommahaxay, Alain  
    ;
    Bogaerts, Lieve  
    ;
    Naito, Yasuyuki
    ;
    Van Cauwenberghe, Marc  
    ;
    Tutunjyan, Nina  
    Proceedings paper
    2011, Eurosensors XXV, 4/09/2011, p.1505-1508

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