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Browsing by Author "Oulmane, Mohamed"

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    Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulations

    Gao, Weimin
    ;
    Ciofi, Ivan  
    ;
    Saad, Yves
    ;
    Matagne, Philippe  
    ;
    Bachman, Michael
    ;
    Oulmane, Mohamed
    Proceedings paper
    2015, Optical Microlithographies XXVIII, 22/02/2015, p.942609

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