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Browsing by Author "Ouzeaud, V."

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    Accurate electrical activation characterization of CMOS ultra-shallow profiles

    Clarysse, Trudo
    ;
    Dortu, Fabian
    ;
    Vanhaeren, Danielle  
    ;
    Hoflijk, Ilse  
    ;
    Geenen, Luc
    ;
    Janssens, Tom
    Journal article
    2004, Materials Science and Engineering B, 114-115, p.166-173

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