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Browsing by Author "Pagès, X."

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    Thermal stability of Pt and C-doped NiSi films

    Machkaoutsan, Vladimir  
    ;
    Pagès, X.
    ;
    Bauer, M.
    ;
    Thomas, S.
    ;
    Mertens, Sofie  
    ;
    Verheyden, K.
    Proceedings paper
    2007, 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.145-149

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