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Browsing by Author "Pages, Xavier"

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    Pattern-dependent heating of 3D structures

    Granneman, Ernst
    ;
    Pages, Xavier
    ;
    Terhorst, Huub
    ;
    Verheyden, Kurt
    ;
    Vanormelingen, Koen
    Proceedings paper
    2007, 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.131-138

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