Browsing by Author "Painter, Ben"

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Checking design conformance and optimizing manufacturability using automated double-patterning decomposition

Cork, Christopher M.
;
Ward, Brian
;
Barnes, Levi D.
;
Painter, Ben
;
Lucas, Kevin
;
Luk-Pat, Gerry
Proceedings paper
2008, Design for Manufacturability through Design-Process Integration II, 24/02/2008, p.69251Q
Design compliance for Spacer Is Dielectric (SID) patterning

Luk-Pat, Gerard
;
Miloslavsky, Alex
;
Painter, Ben
;
Lin, Li
;
De Bisschop, Peter
;
Lucas, Kevin
Proceedings paper
2012, Optical Microlithography XXV, 12/02/2012, p.83260D