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Browsing by Author "Palov, A P"

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    Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching

    Palov, A P
    ;
    Mankelevich, Yu A
    ;
    Rakhimova, T V
    ;
    Shamiryan, Denis
    Journal article
    2010, Journal of Physics D: Applied Physics, (43) 7, p.75203

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