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    Deep learning nanometrology of line edge roughness

    Giannatou, Eva
    ;
    Constantoudis, Vassilios
    ;
    Papavieros, George
    ;
    Papageorgiou, Harris
    Proceedings paper
    2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 2019-02-24, p.1095920

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