Browsing by Author "Pardoen, T."
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Publication One-mask CMOS compatible process for the fabrication of three-dimensional self-assembled thin-film SOI microelectromechanical systems
;Iker, Francois ;André, N. ;Pardoen, T.Raskin, J.P.Journal article2005, Electrochemical and Solid State Letters, (8) 10, p.H87-H89