Browsing by Author "Park, Sarohan"
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Publication EUV contact holes and pillars pattering
Proceedings paper2015, Extreme Ultraviolet (EUV) Lithography VI, 22/02/2015, p.94220SPublication Staggered pillar patterning using 0.33NA EUV lithography
Proceedings paper2019, Extreme Ultraviolet (EUV) Lithography X, 25/02/2019, p.109570T-1-109570T-10