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    Table-top HHG EUV scatterometry for roughness and structural parameters evaluation in nano-stacks

    Krasnov, Vitaly  
    ;
    Pasic, Len
    ;
    Herrero, Analia Fernandez
    ;
    Soltwisch, Victor
    Proceedings paper
    2025, EOS Annual Meeting (EOSAM). Section: Face2Phase (F2P), 2025-08-24, p.01019

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