Browsing by Author "Pasyuta, V.M."
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Publication Pore sealing of SiOCH ultra low-k dielectrics with polyimide Langmuir-Blodgett film
;Goloudina, S.I. ;Ivanov, A.S. ;Krishtab, M.B. ;Luchinin, V.V. ;Pasyuta, V.M.Gofman, I.V.Proceedings paper2012, Interconnect Challenges for CMOS Technology - Materials, Processes and Reliability for Downscaling, Packaging and 3D Stacking, 9/04/2012, p.mrss12-1428-c02-