Browsing by Author "Patz, Michael"
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Publication Evaluation of gas cluster ion beam processing for sealing af a porous dielectric
Proceedings paper2005-01, Advanced Metallization Conference 2004, 19/10/2004, p.463-468Publication Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
Journal article2003, Microelectronic Engineering, (70) 2_4, p.293-301Publication Understanding adhesion failure in low-k dielectric stacks during chemical mechanical polishing
Proceedings paper2004-01, Thin Film - Stresses and Mechanical Properties X, 1/12/2003, p.131-136