Browsing by Author "Pawlak, B.J."
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Publication Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si
Journal article2014, Applied Physics Letters, (105) 22, p.221603Publication Probing doping conformality in fin shaped field effect transistor structures using resistors
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.396-401