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Browsing by Author "Pedrine, Antonio"

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    Low temperature wafer bonding on silicon nitride

    Pedrine, Antonio
    ;
    De Poorter, John
    ;
    De Schepper, Luc
    ;
    Baert, Kris
    Proceedings paper
    1995, Simulation and Design of Microstructures; Sept. 1995; Southampton, UK., 1/09/1995, p.285-292

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