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Browsing by Author "Pelzing, P."

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    n+ doping of Ge by P or As implantation and flash-lamp annealing

    Wündisch, C.
    ;
    Posselt, M.
    ;
    Anwand, W.
    ;
    Schmidt, B.
    ;
    Grötzschel, R.
    ;
    Mücklich, A.
    ;
    Skorupa, W.
    Meeting abstract
    2008, E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008

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