Browsing by Author "Pelzing, P."
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Publication n+ doping of Ge by P or As implantation and flash-lamp annealing
;Wündisch, C. ;Posselt, M. ;Anwand, W. ;Schmidt, B. ;Grötzschel, R. ;Mücklich, A.Skorupa, W.Meeting abstract2008, E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008