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Browsing by Author "Peng, Hsing-Ying"

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    Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)

    Lukaszewicz, Mikolaj
    ;
    de Marneffe, Jean-Francois  
    ;
    Wilson, Chris  
    ;
    Zhang, Liping  
    ;
    Peng, Hsing-Ying
    Meeting abstract
    2012, Gaseous Electronics Conference, 22/10/2012

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