Browsing by Author "Pepper, V."
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Publication Impact of using filtration on global and local uniformity of spin on glue materials
Proceedings paper2011, Micromachining and Microfabrication Process Technology XVI, 22/01/2011, p.79260FPublication Metrology and inspection for process control during bonding and thinning of stacked wafers for manufacturing 3D SIC's
Proceedings paper2011, IEEE 61st Electronic Components and Technology Conference - ECTC, 1/06/2011, p.999-1002