Browsing by Author "Perova, Natalia A."
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Publication Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy
; ;Perova, Natalia A.; ; ;Goessens, ClausGrietens, BobProceedings paper2003, MEMS/MOEMS: Advances in Photonics Communications, Sensing, Metrology, Packaging and Assembly, 28/10/2002, p.54-63Publication Polycrystalline SiGe technology for uncooled microbolometer arrays
Oral presentation2003, Proceedings of SPIE Symposium Materials for Infrared Detectors IIIPublication Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs
Proceedings paper2003, Infrared Technology and Applications XXIX, 21/04/2003, p.446-457