Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Petersen, D.H"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    In-line resistance measurement of single nanometer-wide trenches and fins

    Bogdanowicz, Janusz  
    ;
    Parmentier, Brigitte  
    ;
    Schulze, Andreas
    ;
    Moussa, Alain  
    Proceedings paper
    2016, ECS 230th Fall Meeting: Pacific Rim Meeting - PRiME, 2/10/2016, p.2008

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings