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Browsing by Author "Petersen, D.H"

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    In-line resistance measurement of single nanometer-wide trenches and fins

    Bogdanowicz, Janusz  
    ;
    Parmentier, Brigitte  
    ;
    Schulze, Andreas
    ;
    Moussa, Alain  
    Proceedings paper
    2016, ECS 230th Fall Meeting: Pacific Rim Meeting - PRiME, 2/10/2016, p.2008

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