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Browsing by Author "Petit, R."

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    Atomic layers deposited nano-mechanical resonators for silicon photonics

    Rajendran, Khannan  
    ;
    Petit, R.
    ;
    Detavernier, C.
    ;
    Van Thourhout, Dries  
    Oral presentation
    2021, Frontiers of Nanomechanical Systems Workshop 2021

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