Browsing by Author "Phillips, Mark"
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Publication Evaluation of a new advanced low-k material
Journal article2011, Japanese Journal of Applied Physics, 50, p.05EB03Publication First evaluation of new advanced SOG 2.0 low-k material
Meeting abstract2010, Advanced Metallization Conference; 20th Asian Session - ADMETA, 19/10/2010Publication Impact of curing condition on chemical stability of ultralow-k PMO material
Proceedings paper2012, Interconnect Challenges for CMOS Technology - Materials, Processes and Reliability for Downscaling, Packaging and 3D Stacking, 9/04/2012, p.mrss12-1428-c02-