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Browsing by Author "Piatti, Lorenzo"

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    Fundamental understanding of exposure and process chemistry of Sn-based metal oxide resists: effects of ambient environment during post-exposure delay and bake

    Pollentier, Ivan  
    ;
    Holzmeier, Fabian  
    ;
    Fallica, Roberto  
    ;
    Chen, Ying-Lin  
    ;
    Singh, Dhirendra  
    Journal article
    2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 1, p.014601

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