Browsing by Author "Piatti, Lorenzo"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Fundamental understanding of exposure and process chemistry of Sn-based metal oxide resists: effects of ambient environment during post-exposure delay and bake
Journal article2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 1, p.014601