Browsing by Author "Plawsky, J.L."
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Publication Internal matrix structure of low-k nanoporous silica and its relation to mechanical properties
;Saxena, R. ;Rodriguez, O. ;Cho, W. ;Gills, W.N. ;Plawsky, J.L. ;Baklanov, MikhaïlMogilnikov, K.P.Journal article2004-12, Journal of Non-Chrystalline Solids, 349, p.189-199Publication Modification of nanoporous silica structures by fluorocarbon plasma treatment
;Cho, W. ;Saxena, R. ;Rodriguez, O. ;Achanta, R. ;Ojha, M. ;Plawsky, J.L. ;Gill, W.N.Baklanov, MikhaïlProceedings paper2004-06, Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics, 12/04/2004, p.103-108