Browsing by Author "Poncet, A."
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Publication An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
Proceedings paper1994, International Electron Devices Meeting (IEDM). Technical Digest, 11/12/1994, p.877-880Publication Simulation of mechanical stresses during shallow trench isolation process
Proceedings paper1998, Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France., p.120-123Publication The STORM technology CAD system
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