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Browsing by Author "Popa, Ovidiu"

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    Attenuated phase shift maks using MoSi as an opaque layer

    Popa, Ovidiu
    ;
    Jonckheere, Rik  
    Proceedings paper
    1995, 18th International Semiconductor Conference. CAS'95 Proceedings, 10/10/1995, p.171-4
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    Molybdenum Silicide Based Attenuated Phase-Shift Masks

    Jonckheere, Rik  
    ;
    Ronse, Kurt  
    ;
    Popa, Ovidiu
    ;
    Van den hove, Luc  
    Journal article
    1994, J. Vac. Sci. Technol. B, (12) 6, p.3765-3772

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