Browsing by Author "Popa, Ovidiu"
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Publication Attenuated phase shift maks using MoSi as an opaque layer
;Popa, OvidiuProceedings paper1995, 18th International Semiconductor Conference. CAS'95 Proceedings, 10/10/1995, p.171-4Publication Molybdenum Silicide Based Attenuated Phase-Shift Masks
Journal article1994, J. Vac. Sci. Technol. B, (12) 6, p.3765-3772