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Browsing by Author "Prado, J.L."

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    The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition

    Sun, Yiting  
    ;
    Swerts, Johan  
    ;
    Verdonck, Patrick  
    ;
    Maheshwari, Abhishek
    ;
    Prado, J.L.
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.146-149

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