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Browsing by Author "Preil, Moshe E."

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    Assessment of OPC effectiveness using two-dimensional metrics

    Wiaux, Vincent  
    ;
    Philipsen, Vicky  
    ;
    Jonckheere, Rik  
    ;
    Vandenberghe, Geert  
    ;
    Verhaegen, Staf
    Proceedings paper
    2002, Optical Microlithography XV, 5/03/2002, p.395-406

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