Browsing by Author "Prewett, P. D."
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Publication Effects on IC quality of 5X reticle repair using FIB with stain reduction
Proceedings paper1994, Integrated Circuit Metrology, Inspection and Process Control VIII, 28/02/1994, p.211-218Publication FIB repair of reticle defects with antistaining-effects on optical lithography from G-line to DUV
Journal article1994, Microelectronic Engineering, 23, p.127-130