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    Substrate independent elastic modulus of thin low dielectric constant materials

    Okudur, Oguzhan Orkut  
    ;
    Vanstreels, Kris  
    ;
    De Wolf, Ingrid  
    ;
    Hangen, Ude
    ;
    Qiu, Anqi
    Journal article
    2017, Advanced Engineering Materials, (19) 8, p.1600653

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