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Browsing by Author "Quaeyhaegens, D."

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    Lateral and vertical dopant profiling in semiconductors by atomic force microscopy using conducting tips

    De Wolf, Peter
    ;
    Snauwaert, Johan
    ;
    Hellemans, L.
    ;
    Clarysse, Trudo
    ;
    Vandervorst, Wilfried  
    Journal article
    1995, J. Vac. Sci. Technol. A, (13) 3, p.1699-704

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