Browsing by Author "Quli, Farhat"
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Publication Effect of chuck temperature adjustment on STI CDU and sensor wafer readouts
Proceedings paper2013-08, 35th International Symposium on Dry Process - DPS, 29/08/2013, p.13-14Publication Study on processing step uniformity tuning during FET fabrication and sensor wafer response as a function of chuck temperature adjustment
Journal article2014, Japanese Journal of Applied Physics, (53) 3, p.03DC02