Browsing by Author "Racz, A."
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Publication High speed atmospheric pressure ALD for industrial scale solar cell passivation
Proceedings paper2010, 25th European Photovoltaic Solar Energy Conference and Exhibition - EPVSEC, 6/09/2010, p.1110-1113Publication Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
Proceedings paper2010, 25th European Photovoltaic Solar Energy Conference - EPVSEC, 6/09/2010, p.1118-1120Publication Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
Journal article2012, Solid State Phenomena, 187, p.357-361