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Browsing by Author "Rangelov, Ventzeslav"

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    Exploring capabilities of electrical linewidth measurement (ELM) techniques

    Rangelov, Ventzeslav
    ;
    Sarstedt, Margit
    ;
    Somerville, John
    ;
    Marschner, Thomas
    ;
    Jonckheere, Rik  
    Journal article
    2001, Microelectronic Engineering, (57-58) 1_4, p.673-681

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