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Browsing by Author "Rathsfeld, Andreas"

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    Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithography

    De Bisschop, Peter  
    ;
    Erdmann, Andreas
    ;
    Rathsfeld, Andreas
    Proceedings paper
    2005, Optical Microlithography XVIII, 27/02/2005, p.243-253

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