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Browsing by Author "Raut, H. K."

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    34 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask Geometries

    Raut, H. K.
    ;
    Hasan, Mahmudul  
    ;
    Das, Arijit  
    ;
    Pak, Murat  
    Proceedings paper
    2024, 2024 Conference on Photomask Technology, 2024-09-29, p.132161N

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