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Browsing by Author "Rehman, Aman-ur"

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    Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching

    Gul, Banat
    ;
    Tinck, Stefan
    ;
    De Schepper, Peter  
    ;
    Rehman, Aman-ur
    Journal article
    2015, Journal of Physics D: Applied Physics, (48) 2, p.25202

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